Motorized X/XY Stage


¥ 390,000
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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Please, prepare the cable for 10 lead motor.
2 phase stepper motor is available. [Model] XA16F-L22-BM (Additional Cost¥40,000)

Specification (Mechanical)
Model NumberXA16F-L22
Mirror Model NumberXA16F-L22-R
Table Size160mm×160mm
Guide MechanismLinear Guide
Motion Range±100mm
Lead MechanismBall Screw, Lead 5.0mm
Resolution Full/Half Step10μm/5μm
Resolution Micro Step (1/20 div)0.5μm
Maximum Speed50mm/sec
Accumulated Lead Error≦20μm/200mm
Lost Motion≦5μm
Straightness (Horizontal)≦5μm/200mm
Straightness (Vertical)≦5μm/200mm
Moment Load Stiffness0.02 arcsec/N・cm
Load Capacity392N (40kgf)
MaterialSteel (Table: Aluminum Alloy)
FinishingMatt Black
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental Motor: PK566-B)
2 phase stepper motor (Oriental Motor: PK264JDB)
Motor Shaft Diameter:Φ8mm Conformance option handle: B type
Standard Connector20Pin Rectangular (Hirose: PC-1620, P-1620A-STA)
Sensor ModelF-104(LIMIT), F-105(HOME), F-107(INDEX)
Vacuumup to "ultra heigh vacuum" (UHV), contact us.
Clean room-C Lubricant exchange
Mirror Symmetrysee technical for possibilities, contact us
Motor handleto manually move the stage
Motor typenearly any motor type can be mounted, contact us.
Connector typeexchange to DSub 15 connector, contact us.
Limitdifferent types of optical/mechanical, contact us.
EncoderLinear encoders (up to 50nm), contact us.
Adaptersmount stages together. contact us.**
CustomizationAnything you need? contact us.**
Overhaul Price
¥ 72,000~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number) ¥ 54,000
Vacuum Lubricant Change Price ("-V" at the end of model number) ¥ 54,000
Motor Change Option
Same Size Motor Change Price ¥ 15,000~
Different Size Motor Change Price ¥ 36,000~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Measuring report

Filetype Filename Filesize
(Adobe PDF) XA16F Series 01 532.7 KB

Application Example
Application-Test... just the adapter.
Motorized X/XY Stage