Manual Z Stage(Vertical Stage)


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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Specification (Mechanical)
Model NumberZM10A-C3C
Mirror Model NumberZM10A-C3C-R
Table Size100mm×100mm
Guide MechanismCross-Roller Guide
Motion Range± 1.5mm
Verticalness≦ 3μm/3mm
Minimum ReadoutCoarse 2.5μm/div, Fine 0.125μm/div
Load Capacity 68.6N (7kgf)
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
ActuatorFine Pitch Positioner FPP03-13(13mm)
Overhaul Price
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.


Lubricant exchange is not available for actuators on stages.

Link to Technical informaiton of Z Stage

Manual Z Stage