Motorized Z Stage(Vertical Stage)


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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

This is X stage "XA10A-L101" with a bracket.
2 phase stepper motor is available [Model] ZA10A-X1T01-BM (Additional Cost¥40,000)
Specification (Mechanical)
Model NumberZA10A-X1T01
Mirror Model NumberZA10A-X1T01-R
Table Size100mm×100mm
Guide MechanismLinear Guide
Motion Range±50mm
Lead MechanismGround Screw, Lead 1.0mm
Resolution Full/Half Step2μm/1μm
Resolution Micro Step (1/20 div)0.1μm
Maximum Speed10mm/sec ※When using a driver with an input power supply of 100 VAC specifications
Lost Motion≦2μm
Load Capacity 98N (10kgf)
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Weight 6.8kg
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental Motor: C087Q-9215P)
2 phase stepper motor (Oriental Motor: PK264JDB)
Motor Shaft Diameter:Φ8mm Conformance option handle: B type
Standard Connector5 phase stepper motor :20Pin Round (Hirose: RP13A-12RA-20PC)
2 phase stepper motor:20Pin Rectangular (Hirose: PC-1620, P-1620A-STA)
Sensor ModelF-104(LIMIT), F-105(HOME)
Overhaul Price
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized Z Stage