Motorized Z Stage(Vertical Stage)


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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

This is X stage "XA16A-R101" with a bracket.
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available [Model] ZA16A-X101-BM (Additional Cost¥40,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
Model NumberZA16A-X101
Mirror Model NumberZA16A-X101-R
Table Size160mm×124mm
Guide MechanismCross-Roller Guide
Motion Range±30mm
Lead MechanismGround Screw, Lead 1.0mm
Resolution Full/Half Step2μm/1μm
Resolution Micro Step (1/20 div)0.1μm
Maximum Speed10mm/sec ※When using a driver with an input power supply of 100 VAC specifications
Lost Motion≦4μm
Load Capacity 98N (10kgf)
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Weight 6.2kg
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental Motor: C087Q-9215P)
2 phase stepper motor (Oriental Motor: PK264JDB)
Motor Shaft Diameter:Φ8mm Conformance option handle: B type
Standard Connector5 phase stepper motor :20Pin Round (Hirose: RP13A-12RA-20PC)
2 phase stepper motor:20Pin Rectangular (Hirose: PC-1620, P-1620A-STA)
Sensor Model20Pin Round (Hirose: RP13A-12RA-20PC)
Overhaul Price
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized Z Stage