Vacuum Rotation Stage
MVRA05A-W02
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Remarks and Features
Specification (Mechanical)
Model Number | MVRA05A-W02 |
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Table Size | φ49mm |
Guide Mechanism | Bearing |
Angular Range | ±140° |
Lead Mechanism | Worm & Worm Wheel 1/90 |
Resolution Full/Half Step | 0.008°/0.004° |
Resolution Micro Step (1/20 div) | 0.0004° |
Maximum Speed | 20°/sec(5kpps/sec,Half) |
Accumulated Lead Error | ≦0.02°/360° |
Lead Error | ≦0.015°/4° |
Lost Motion | ≦0.009° |
Angular Repeatiblility | ≦0.01° |
Pitch Error | ≦0.015°/4° |
Backlash | ≦0.005° |
Surface Runout | ≦20μm/360° |
Eccentricity | ≦10μm/360° |
Moment Load Stiffness | 1.12 arcsec/N・cm |
Load Capacity | 39.2N (4kgf) |
Material | Aluminum alloy |
Weight | 0.8kg |
Specification (Electrical)
Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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Standard Connector | Vacuum D-Sub 9Pin |
Overhaul Price |
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~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | |
Vacuum Lubricant Change Price ("-V" at the end of model number) |
Motor Change Option | |
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Same Size Motor Change Price | ~ |
Different Size Motor Change Price | ~ |
Vacuum Rotation Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories