Vacuum Rotation Stage
MVRA10A-W01
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Specification (Mechanical)
| Model Number | MVRA10A-W01 |
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| Table Size | φ98mm |
| Guide Mechanism | Bearing |
| Angular Range | ±140° |
| Lead Mechanism | Worm & Worm Wheel 1/180 |
| Resolution Full/Half Step | 0.004°/0.002° |
| Resolution Micro Step (1/20 div) | 0.0002° |
| Maximum Speed | 10°/sec(5kpps/sec,Half) |
| Accumulated Lead Error | ≦0.01°/360° |
| Lead Error | ≦0.01°/2° |
| Lost Motion | ≦0.005° |
| Angular Repeatiblility | ≦0.01° |
| Pitch Error | ≦0.01°/2° |
| Backlash | ≦0.006° |
| Surface Runout | ≦20μm/360° |
| Eccentricity | ≦10μm/360° |
| Moment Load Stiffness | 0.10 arcsec/N･cm |
| Load Capacity | 98N (10kgf) |
| Material | Aluminum alloy |
| Weight | 2.4kg |
Specification (Electrical)
| Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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| Standard Connector | Vacuum D-Sub 9Pin |
| Overhaul Price |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
Vacuum Rotation Stage
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- Compact 6-Axes Manipulator
- Laser measurement system
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