Vacuum Rotation Stage


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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Specification (Mechanical)
Model NumberMVRA16A-WH01
Table Sizeφ158mm
Guide MechanismBearing
Angular Range±170°
Lead MechanismWorm & Worm Wheel 1/180
Resolution Full/Half Step0.004°/0.002°
Resolution Micro Step (1/20 div)0.0002°
Maximum Speed10°/sec(5kpps/sec,Half)
Lead Error≦0.01°/360°
Lost Motion≦0.008°
Angular Repeatiblility≦0.004°
Pitch Error≦0.004°/2°
Surface Runout≦20μm/360°
Moment Load Stiffness0.10 arcsec/N・cm
Load Capacity588N (60kgf)
MaterialAluminum alloy
Specification (Electrical)
Standard MotorFive(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Standard ConnectorVacuum D-Sub 9Pin
Overhaul Price
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price


Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bakable stages.

Link to Technical informaiton of Vacuum Compatible Stage

Vacuum Rotation Stage