Vacuum X/XY Stage


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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Specification (Mechanical)
Model NumberMVXA07A-R103
Table Size70mm×70mm
Guide MechanismCross-Roller Guide
Motion Range±10mm
Lead MechanismGround Screw, Lead 0.5mm
Resolution Full/Half Step1μm/0.5μm
Resolution Micro Step (1/20 div)0.05μm
Maximum Speed2.5mm/sec
Accumulated Lead Error≦10μm/20mm
Lost Motion≦1μm
Straightness (Horizontal)≦1μm/20mm
Straightness (Vertical)≦1μm/20mm
Moment Load Stiffness0.10 arcsec/N・cm
Load Capacity98N (10kgf)
MaterialAluminum Alloy
Specification (Electrical)
Standard MotorFive(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Standard ConnectorVacuum D-Sub 9Pin
Overhaul Price
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price


Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bakable stages.

Link to Technical informaiton of Vacuum Compatible Stage

Vacuum X/XY Stage