Vacuum X/XY Stage
MVXA10A-R102
| Price(JPY) |
|---|
| ¥ |
| Quote |
|---|
| Quantity |
Compare with:
Select a product to compare
| Drawings file |
|---|
 |
| Drawing For Download |
|---|
   |
| Connect Fig File |
|---|
Remarks and Features
Specification (Mechanical)
| Model Number | MVXA10A-R102 |
|---|---|
| Table Size | 100mm×100mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | ±12.5mm |
| Lead Mechanism | Ground Screw, Lead 0.5mm |
| Resolution Full/Half Step | 1μm/0.5μm |
| Resolution Micro Step (1/20 div) | 0.05μm |
| Maximum Speed | 2.5mm/sec |
| Accumulated Lead Error | ≦8μm/25mm |
| Repeatability | ≦±0.5μm |
| Lost Motion | ≦1μm |
| Straightness (Horizontal) | ≦1μm/25mm |
| Straightness (Vertical) | ≦1μm/25mm |
| Backlash | ≦0.5μm |
| Moment Load Stiffness | 0.02 arcsec/N・cm |
| Load Capacity | 196N (20kgf) |
| Material | Aluminum Alloy |
| Weight | 1.8kg |
Specification (Electrical)
| Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
|---|---|
| Standard Connector | Vacuum D-Sub 9Pin |
| Overhaul Price |
|---|
| ~ |
| Lubricant Change Option | |
|---|---|
| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
|---|---|
| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
Vacuum X/XY Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories