Vacuum X/XY Stage
MVXA16A-R101
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Specification (Mechanical)
| Model Number | MVXA16A-R101 |
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| Table Size | 160mm×124mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | ± 30mm |
| Lead Mechanism | Ground Screw, Lead 1.0mm |
| Resolution Full/Half Step | 2μm/1μm |
| Resolution Micro Step (1/20 div) | 0.1μm |
| Maximum Speed | 5mm/sec |
| Accumulated Lead Error | ≦±10μm/60mm |
| Repeatability | ≦±0.5μm |
| Lost Motion | ≦2μm |
| Straightness (Horizontal) | ≦ 2μm/60mm |
| Straightness (Vertical) | ≦ 2μm/60mm |
| Backlash | ≦1μm |
| Moment Load Stiffness | 0.03 arcsec/N・cm |
| Load Capacity | 294N (30kgf) |
| Material | Aluminum Alloy |
| Weight | 3.6kg |
Specification (Electrical)
| Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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| Standard Connector | Vacuum D-Sub 9Pin |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
Vacuum X/XY Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories