Vacuum X/XY Stage


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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Specification (Mechanical)
Model NumberMVXA16A-R101
Table Size160mm×124mm
Guide MechanismCross-Roller Guide
Motion Range± 30mm
Lead MechanismGround Screw, Lead 1.0mm
Resolution Full/Half Step2μm/1μm
Resolution Micro Step (1/20 div)0.1μm
Maximum Speed5mm/sec
Accumulated Lead Error ≦±10μm/60mm
Lost Motion≦2μm
Straightness (Horizontal) ≦ 2μm/60mm
Straightness (Vertical) ≦ 2μm/60mm
Moment Load Stiffness0.03 arcsec/N・cm
Load Capacity294N (30kgf)
MaterialAluminum Alloy
Specification (Electrical)
Standard MotorFive(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Standard ConnectorVacuum D-Sub 9Pin
Overhaul Price
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price


Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bakable stages.

Link to Technical informaiton of Vacuum Compatible Stage

Vacuum X/XY Stage