Motorized X/XY Stage

XA07F-R103

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Remarks and Features

Vertical layout as a Z stage is available
2 phase stepper motor is available. [Model] XA07F-R103-BM
Specification (Mechanical)
Model NumberXA07F-R103
Mirror Model NumberXA07F-R103-R
Table Size 70mm×70mm
Guide MechanismCross-Roller Guide
Motion Range± 10mm
Lead MechanismGround Screw, Lead 0.5mm
Resolution　Full/Half Step 0.5μm/0.25μm
Resolution　Micro Step (1/20 div)0.025μm
Maximum Speed 2.5mm/sec
Accumulated Lead Error≦10μm/20mm (AVE. 1.69μm/20mm)
Repeatability≦±0.3μm (AVE. ±0.06μm)
Lost Motion≦ 1μm (AVE. 0.2μm)
Straightness (Horizontal)≦ 0.5μm/20mm (AVE. 0.15μm/20mm)
Straightness (Vertical)≦ 0.6μm/20mm (AVE. 0.27μm/20mm)
Backlash≦1μm (AVE. 0.26μm)
Moment Load Stiffness0.05 arcsec/N･cm (AVE. 0.03 arcsec/N･cm)
Load Capacity 98N (10kgf)
MaterialSteel
FinishingNickel Plating
Weight1.3kg
Perpendicularity-
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental motor:PK544PMB)
2 phase stepper motor (Oriental motor:PKP244D15B)
Motor shaft diameter:Φ5mm
Conformance option handle: A type
Standard Connector20Pin Round (Hirose: RP13A-12JG-20PC)
Sensor ModelF-116(HOME, LIMIT), Mirror Model: F-116R(HOME, LIMIT)
Overhaul Price
~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
　Control Electronics
　Motor Controller　See the corresponded motor controller
　Motor Driver　See the corresponded motor driver
　Motor Cable　See the corresponded motor cable
　Accessory
　Accessory　See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

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Motorized X/XY Stage