Motorized X/XY Stage
XA16A-R202
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Remarks and Features
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA16A-R202-BM (Additional Cost¥40,000)
Note: 2 phase stepper motor specifications change connector.
2 phase stepper motor is available. [Model] XA16A-R202-BM (Additional Cost¥40,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
Model Number | XA16A-R202 |
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Mirror Model Number | XA16A-R202-R |
Table Size | 160mm×124mm |
Guide Mechanism | Cross-Roller Guide |
Motion Range | ± 30mm |
Lead Mechanism | Ball Screw, Lead 2.0mm |
Resolution Full/Half Step | 4μm/2μm |
Resolution Micro Step (1/20 div) | 0.2μm |
Maximum Speed | 20mm/sec ※When using a driver with an input power supply of 100 VAC specifications |
Accumulated Lead Error | ≦ 6μm/60mm (AVE. 1.21μm/60mm) |
Repeatability | ≦±0.2μm (AVE. ±0.03μm) |
Lost Motion | ≦ 2μm (AVE. 0.63μm) |
Straightness (Horizontal) | ≦ 1μm/60mm (AVE. 0.27μm/60mm) |
Straightness (Vertical) | ≦ 2μm/60mm (AVE. 0.38μm/60mm) |
Backlash | ≦0.5μm (AVE. 0.1μm) |
Moment Load Stiffness | 0.01 arcsec/N・cm (AVE. 0.005 arcsec/N・cm) |
Load Capacity | 294N (30kgf) |
Material | Aluminum Alloy |
Finishing | Clear-Matt Anodizing |
Weight | 3.6kg |
Perpendicularity | - |
Specification (Electrical)
Standard Motor | 5 phase stepper motor (Oriental Motor: C087Q-9215P) 2 phase stepper motor (Oriental Motor: PK264JDB) Motor Shaft Diameter:Φ8mm Conformance option handle: B type |
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Standard Connector | 5 phase stepper motor :20Pin Round (Hirose: RP13A-12RA-20PC) 2 phase stepper motor:20Pin Rectangular (Hirose: PC-1620, P-1620A-STA) |
Sensor Model | F-101(HOME, LIMIT) |
Overhaul Price |
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~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | |
Vacuum Lubricant Change Price ("-V" at the end of model number) |
Motor Change Option | |
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Same Size Motor Change Price | ~ |
Different Size Motor Change Price | ~ |
Control Electronics | |
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Motor Controller | See the corresponded motor controller |
Motor Driver | See the corresponded motor driver |
Motor Cable | See the corresponded motor cable |
Accessory | |
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Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
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