Motorized X/XY Stage
YA16F-L23301
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Returning direction is determined with zone sensor. CW side’s light is intercepted in all time.
Please, prepare the cable for 5 lead motor.
Accumulated lead error and straightness (vertical) are guaranteed accuracy in a single axis.
2 phase stepper motor is available [Model] YA16F-L23301-BM (Additional Cost￥80,000)
Note: 2 phase stepper motor specifications change connector.
Please, prepare the cable for 5 lead motor.
Accumulated lead error and straightness (vertical) are guaranteed accuracy in a single axis.
2 phase stepper motor is available [Model] YA16F-L23301-BM (Additional Cost￥80,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
| Model Number | YA16F-L23301 |
|---|---|
| Mirror Model Number | YA16F-L23301-RRR |
| Table Size | 160mm×160mm |
| Guide Mechanism | Linear Guide |
| Motion Range | ±152mm(upper axis) , ± 152mm(Lower axis) |
| Lead Mechanism | Ball Screw, Lead 5.0mm |
| Resolution Full/Half Step | 10μm / 5μm |
| Resolution Micro Step (1/20 div) | 0.5μm |
| Maximum Speed | 50mm/sec ※When using a driver with an input power supply of 100 VAC specifications |
| Accumulated Lead Error | ≦20μm/304mm(upper axis) , ≦20μm/304mm(Lower axis) |
| Repeatability | ≦±0.5μm |
| Lost Motion | ≦ 5μm |
| Straightness (Horizontal) | ≦ 5μm/304mm(upper axis) , ≦ 5μm/304mm(Lower axis) |
| Straightness (Vertical) | ≦ 5μm/304mm(upper axis) , ≦ 5μm/304mm(Lower axis) |
| Backlash | ≦2μm |
| Moment Load Stiffness | 0.04 arcsec/N･cm |
| Load Capacity | 205.8N (21kgf) |
| Material | Steel (Table: Aluminum Alloy) |
| Finishing | Matt Black |
| Weight | 36.4kg |
| Perpendicularity | ≦10μm |
Specification (Electrical)
| Standard Motor | 5 phase stepper motor (Oriental motor:C087Q-9215P) 2 phase stepper motor (Oriental motor:PK264JDB) Motor shaft diameter:Φ8mm |
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| Standard Connector | 5 phase stepper motor:20Pin Round (Hirose:RP13A-12RA-20PC) 2 phase stepper motor:20Pin Rectangular (Hirose:PC-1620,P-1620A-STA) |
| Sensor Model | F-104(LIMIT), F-105(HOME) |
| Overhaul Price |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
| Control Electronics | |
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| Motor Controller | See the corresponded motor controller |
| Motor Driver | See the corresponded motor driver |
| Motor Cable | See the corresponded motor cable |
| Accessory | |
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| Accessory | See the corresponded accessory as like spacer or bracket |
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