Vacuum X/XY Stage
MVXA10A-L201
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Remarks and Features
Specification (Mechanical)
Model Number | MVXA10A-L201 |
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Table Size | 100mm×100mm |
Guide Mechanism | Linear Guide |
Motion Range | ±50mm |
Lead Mechanism | Ball Screw, Lead 2.0mm |
Resolution Full/Half Step | 4μm/2μm |
Resolution Micro Step (1/20 div) | 0.2μm |
Maximum Speed | 10mm/sec |
Accumulated Lead Error | ≦15μm/100mm |
Repeatability | ≦±0.5μm |
Lost Motion | ≦2μm |
Straightness (Horizontal) | ≦3μm/100mm |
Straightness (Vertical) | ≦3μm/100mm |
Backlash | ≦2μm |
Moment Load Stiffness | 0.05 arcsec/N・cm |
Load Capacity | 196N (20kgf) |
Material | Aluminum Alloy |
Weight | 3.5kg |
Specification (Electrical)
Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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Standard Connector | Vacuum D-Sub 9Pin |
Overhaul Price |
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~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | |
Vacuum Lubricant Change Price ("-V" at the end of model number) |
Motor Change Option | |
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Same Size Motor Change Price | ~ |
Different Size Motor Change Price | ~ |
Vacuum X/XY Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories